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feat(ontology): add BGBM grinding/metallization modules and promote assembly-process superclass - #27

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JeremyYao1999:add-bgbm-ontology
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JeremyYao1999 wants to merge 3 commits into
aitomatic:stablefrom
JeremyYao1999:add-bgbm-ontology

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PR: Add BGBM modules + promote assembly-process superclass

Summary

Two additions + one parent-module promotion, all under ontology/ontology/06-osat-packaging-test/00-assembly-processes/:

  • Add 03-backside-grinding/ontology.ttl — wafer backside grinding (thinning) semantics
  • Add 04-backside-metallization/ontology.ttl — wafer backside metallization (BM) semantics
  • Promote 00-assembly-processes/ontology.ttl — replace the placeholder (PlaceholderClass) with a real AssemblyProcess superclass

What's included

Backside grinding (03-backside-grinding)

Class Description
BacksideGrindingProcess In-feed wafer backside thinning process
RoughGrindingStep / FineGrindingStep Coarse vs fine grinding stages
StressReliefStep Wet-etch / dry-polish / CMP damaged-layer removal
TaikoGrindingProcess Edge-retained thinning for ultra-thin wafers
BacksideGrindingDefect Scratch, crack, edge chipping, sub-surface damage, warpage

Properties: hasTargetThickness, hasTotalThicknessVariation (TTV), hasSurfaceRoughness, hasWarpage.

Backside metallization (04-backside-metallization)

Class Description
BacksideMetallizationProcess Ohmic backside contact + solderable surface deposition
ElectronBeamEvaporationProcess / SputteringProcess / ElectroplatingProcess Deposition methods
BacksideMetalStack Ti / Ni(NiV) / Ag(Au) multi-layer roles
BacksideMetallizationDefect Peeling/delamination, voids, interdiffusion, oxidation

Properties: hasMetalStack.

Parent module promotion (resolves dangling reference)

00-die-attach and the two new modules all reference assembly_processes:AssemblyProcess, but the parent module was still a placeholder (PlaceholderClass), leaving those references dangling. This PR promotes AssemblyProcess (subclass of semicont-core:ProcessStep) into the parent module, so every assembly sub-process module shares a consistent, resolvable superclass.

Conventions followed

  • Turtle (.ttl) under the correct layer/subcategory, per ontology/ontology/README.md.
  • owl:versionInfo "0.1.0", prov:wasGeneratedBy curation activity, dc:source / dc:rights, and prov:generatedAtTime provenance on every term.
  • Classes subclass assembly_processes:AssemblyProcess (now defined) and reuse semicont-core:Defect / Material / ProcessStep from 00-shared.
  • Industry-general knowledge only; no company-specific recipes or vendor differentiation.

Validation

Parsed with rdflib 7.6.0 — no syntax errors, and zero dangling subClassOf references after the parent-module promotion.

This ontology module defines the semantics for wafer backside grinding processes, including various grinding steps and associated parameters.
This ontology module defines the semantics for wafer backside metallization processes, including various deposition methods and defect concepts.
Updated ontology metadata and class definitions for assembly processes.
@JeremyYao1999 JeremyYao1999 changed the title feat(ontology): add BGBM grinding/metallization modules and promote assembly-process superclassAdd bgbm ontology feat(ontology): add BGBM grinding/metallization modules and promote assembly-process superclass Aug 24, 2026
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